CSA applies the same expertise developed in aerospace applications to semiconductor manufacturing equipment. With feature sizes continually decreasing, and fabrication and inspection procedures becoming ever more stringent, it is not surprising that vibration is an issue in semiconductor manufacturing. CSA's location in Silicon Valley brings us into contact with the many of the world's leading semiconductor equipment producers. We understand which machines perform which functions in the complex manufacturing process.

Our engineers work with their counterparts at semiconductor companies to troubleshoot vibration and noise related problems that compromise performance and throughput in sophisticated machines. Often, CSA conducts field tests at a customer site to gain greater visibility into the behavior of a particular dynamic system. Analysis tools, including finite element modeling, are then applied as necessary to understand the problem. Using powerful predictive tools, possible fixes are investigated before one or more is implemented in prototype hardware. After installation and successful tests, CSA either acts as a component supplier or the customer integrates the new technology directly into his device or machine.

CSA also works to develop custom products that control vibration for a variety of different semiconductor-related machines or systems. One recent product was a piezoelectric-based active vibration isolation system. This DSP-controlled product protects sensitive equipment from floor vibrations. Because of its modular design, the product may be integrated with OEM assemblies.

Over the last several years, CSA's contributions in the semiconductor industry have expanded out from our core capabilities in structural dynamics and vibration control. The engineering expertise developed over time applies equally well to other areas. These include engineering of electromechanical devices, analysis of precise positioning systems, and elements of motion and process control. CSA looks forward to increased efforts in the semiconductor industry based on our continued development of expertise in digital control of dynamic systems.