System Comparisons

NAME	HX-V100	HX-V150	HX-V200	HX-V500

Purpose	Isolation	Isolation	Isolation	Isolation
Payload Mass	2-20 kg	2-20 kg	1-10 kg	Up to 220 kg
Height	200 mm	200 mm	98 mm	710 mm
Diameter	215 mm	215 mm	203 mm	1625 mm

Range
x	±30 µm	±25 µm	NA	±35 mm
y	±30 µm	±25 µm	NA	±35 mm
z	ą20 µm	±12 µm	NA	±25 mm
theta x	±0.001 rad	±0.001 rad	NA	±2 deg
theta y	±0.001 rad	±0.001 rad	NA	±2 deg
theta z	±0.001 rad	±0.001 rad	NA	±4 deg

Resolution
x	0.1 µm	0.1 µm	NA	5 µm
y	0.1 µm	0.1 µm	NA	5 µm
z	0.1 µm	0.1 µm	NA	5 µm
theta x	10 µrad	10 µrad	NA	50 µrad
theta y	10 µrad	10 µrad	NA	50 µrad
theta z	10 µrad	10 µrad	NA	50 µrad

Bandwidth	250 Hz	200 Hz	200 Hz	Beyond 1 Hz

Suspension freqs.	30-90 Hz	25-75 Hz	20-60 Hz	0.8-3.0 Hz
Test payload mass	2 kg	5.2 kg	2.5 kg	100 kg

Power
Standby	40 W	15 W	75 W	None for standard model
Peak	60 W	25 W	125 W	None for standard model

Actuation	PZ	PZ	EM	Pneumatic
Control System	C3x DSP	C3x DSP	C6x DSP	None
User Interface	cmd line	cmd line	Type 1	None
PZ- piezoelectric, EM- electromagnetic, MS- motor-driven screw, Type 1- basic graphical UI, Type 2- enhanced graphical UI