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| Hexapod System Comparisons |
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Comparison of Key Parameters for
Small and Mid-Sized |
| NAME | HX-V100 | HX-V150 | HX-V200 | HX-V500 |
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| Purpose | Isolation | |||
| Payload Mass | 2-20 kg | 2-20 kg | 1-10 kg | Up to 220 kg |
| Height | 200 mm | 200 mm | 98 mm | 710 mm |
| Diameter | 215 mm | 215 mm | 203 mm | 1625 mm |
| Range | ||||
|
x |
±30 µm | ±25 µm | NA | ±35 mm |
|
y |
±30 µm | ±25 µm | NA | ±35 mm |
|
z |
±20 µm | ±12 µm | NA | ±25 mm |
|
theta x |
±0.001 rad | ±0.001 rad | NA | ±2 deg |
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theta y |
±0.001 rad | NA | ±2 deg | |
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theta z |
±0.001 rad | NA | ±4 deg | |
| Resolution | ||||
|
x |
0.1 µm | NA | 5 µm | |
|
y |
0.1 µm | NA | 5 µm | |
|
z |
0.1 µm | NA | 5 µm | |
|
theta x |
10 µrad | NA | 50 µrad | |
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theta y |
10 µrad | 10 µrad | NA | 50 µrad |
|
theta z |
10 µrad | NA | 50 µrad | |
| Bandwidth | 250 Hz | 200 Hz | Beyond 1 Hz | |
| Suspension freqs. | 30-90 Hz | 25-75 Hz | 20-60 Hz | 0.8-3.0 Hz |
| Test payload mass | 2 kg | 5.2 kg | 2.5 kg | 100 kg |
| Power | ||||
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Standby |
40 W | 15 W | 75 W | None for standard model |
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Peak |
60 W | 25 W | 125 W | None for standard model |
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Actuation |
PZ | PZ | EM | Pneumatic |
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Control System |
C3x DSP | C3x DSP | C6x DSP | None |
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User Interface |
cmd line | cmd line | Type 1 | None |
| PZ- piezoelectric, EM- electromagnetic, MS- motor-driven screw, Type 1- basic graphical UI, Type 2- enhanced graphical UI | ||||